interferoMETER 5200-TH Interferometers
interferoMETER 5200-TH: sensors and measurement devices by Micro-Epsilon for interferometers.
This series on the Micro-Epsilon site (opens in a new tab)
Models in the series
One column per model: what differs between the models of the series.
| Parameter | IMS5200-TH26 | IMS5200-TH26/VAC | IMS5200MP-TH26 |
|---|---|---|---|
| Outputs and interfaces | 4-20mA | RS422 / RS485 | RS422 / RS485 |
| Technical specification details | 1-100 µm documented material-thickness interval | 1-100 µm documented material-thickness interval | 1-100 µm documented material-thickness interval |
| Accuracy | 0.1 µm | 0.1 µm | 0.1 µm |
| Sampling rate reference | IMS5200-TH controller | IMS5200-TH controller | IMS5200MP-TH controller |
| Protection class (DIN EN 60529) | IP40 | IP40 | IP40 |
| Interfaces | EtherCAT | Ethernet | EtherCAT |
| Thickness measuring range | 1–100 µm | 1–100 µm | 1–100 µm |
| Working distance | 24–24.099 mm | 24–24.099 mm | 24–24.099 mm |
| Contact | Non-contact | Non-contact | Non-contact |
| ADC sampling rate | 24000 samples/s | 24000 samples/s | 24000 samples/s |
| Status | Active | Active | Active |
The industries we serve
Frequently asked questions
Answers to the most common questions about our products and services
Measuring thin transparent layers.
1–100 µm; check material and configuration.
Up to 24 kHz; this does not establish uniform accuracy at every setting.
Yes, Multi-Peak measurement of up to five layers.
Through its web interface. Check vacuum suitability for the selected components.
Get a quote or advice
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