interferoMETER 5400-TH Interferometers
interferoMETER 5400-TH: sensors and measurement devices by Micro-Epsilon for interferometers.
Download the datasheet (opens in a new tab) This series on the Micro-Epsilon site (opens in a new tab)
Shared technical specifications for the series
Properties every model in the series has. What differs is in the models table below.
Range across models
The span covered by the models of the series together — not the range of each model.
| Accuracy | 0.1–0.2 µm |
|---|---|
| Working distance | 45–71.365 mm |
Models in the series
One column per model: what differs between the models of the series.
| Parameter | IMS5400-TH45 | IMS5400-TH45/VAC | IMS5400-TH70 | IMS5400MP-TH45 | IMS5400MP-TH45/VAC | IMS5400MP-TH70 |
|---|---|---|---|---|---|---|
| Accuracy | 0.1 µm | 0.1 µm | 0.2 µm | 0.1 µm | 0.1 µm | 0.2 µm |
| Operating temperature | 5–70 °C | 5–70 °C | 5–70 °C | 5–70 °C | 5–70 °C | 5–70 °C |
| Interfaces | Ethernet | Ethernet | EtherCAT | EtherCAT | Ethernet | Ethernet |
| Outputs and interfaces | RS422 / RS485 | Analog 0-10V | RS422 / RS485 | Analog 0-10V | Analog 0-10V | Analog 0-10V |
| Technical specification details | 35-1400 µm documented material-thickness interval | 35-1400 µm documented material-thickness interval | 35-1400 µm documented material-thickness interval | 35-1400 µm documented material-thickness interval | 35-1400 µm documented material-thickness interval | 35-1400 µm documented material-thickness interval |
| Protection class (DIN EN 60529) | IP40 | IP40 | IP40 | IP40 | IP40 | IP40 |
| Sampling rate reference | IMS5400-TH controller | IMS5400-TH controller | IMS5400-TH controller | IMS5400MP-TH controller | IMS5400MP-TH controller | IMS5400MP-TH controller |
| Working distance | 45–46.365 mm | 45–46.365 mm | 70–71.365 mm | 45–46.365 mm | 45–46.365 mm | 70–71.365 mm |
| Thickness measuring range | 35–1400 µm | 35–1400 µm | 35–1400 µm | 35–1400 µm | 35–1400 µm | 35–1400 µm |
| Contact | Non-contact | Non-contact | Non-contact | Non-contact | Non-contact | Non-contact |
| ADC sampling rate | 6000 samples/s | 6000 samples/s | 6000 samples/s | 6000 samples/s | 6000 samples/s | 6000 samples/s |
| Status | Active | Active | Active | Active | Active | Active |
| Datasheet | PDF — IMS5400-TH45 (opens in a new tab) | PDF — IMS5400-TH45/VAC (opens in a new tab) | PDF — IMS5400-TH70 (opens in a new tab) | PDF — IMS5400MP-TH45 (opens in a new tab) | PDF — IMS5400MP-TH45/VAC (opens in a new tab) | PDF — IMS5400MP-TH70 (opens in a new tab) |
The industries we serve
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Aerospace
- Aircraft door-lock position detection
- Airlines & Aerospace Our balancing machines and moment weighing scales for aerospace drives ensure maximum precision, ease of use, and modular flexibility delivering reliability and performance without compromise contributing to your economic success.
- Automatic balancing machines Automatic balancing machines from Schenck are advanced solutions for precise balancing of rotating components in automated production processes. We offer systems and stations for balancing crankshafts, wheels and tires, turbochargers, electric armatures, drives, axle drive units, torque converters, drive shafts, disc-shaped rotors, as well as fans. Our systems increase productivity, ensure consistent quality, and are tailored to the needs of the automotive, energy, and industrial sectors.
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Medical industry
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Environment
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Electric motor manufacturing
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Food industry
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Automotive industry
- Airlines & Aerospace Our balancing machines and moment weighing scales for aerospace drives ensure maximum precision, ease of use, and modular flexibility delivering reliability and performance without compromise contributing to your economic success.
- Automatic balancing machines Automatic balancing machines from Schenck are advanced solutions for precise balancing of rotating components in automated production processes. We offer systems and stations for balancing crankshafts, wheels and tires, turbochargers, electric armatures, drives, axle drive units, torque converters, drive shafts, disc-shaped rotors, as well as fans. Our systems increase productivity, ensure consistent quality, and are tailored to the needs of the automotive, energy, and industrial sectors.
- Axle Drives With our balancing machines for front and rear axle transmissions, the measured unbalance is corrected by drilling into the drive flanges of the transmissions (welding optional). We support you with our interdisciplinary expertise in the production of front and rear axle transmissions from the initial idea to the design stage through to series production.
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Industrial automation
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Plastics
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Optics
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3D printing
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Battery manufacturing
Frequently asked questions
Answers to the most common questions about our products and services
TH is intended for transparent-material thickness and air gaps. Permitted target movement and working distance are separate from the thickness range.
No. The specified range is 35–1400 µm at refractive index 1.5, versus 50–2100 µm for air at approximately 1. Specify material and refractive index.
The standard version specifies one layer; IMS5400MP-TH supports up to five. Multi-Peak is not a feature of every TH controller.
No. The controller table specifies <±100 nm for TH45/TH45-VAC and <±200 nm for TH70 under its stated test conditions.
Resolution is specified at 0.5 kHz with a 64-value moving average and particular temperature/target conditions. The 6 kHz maximum rate is separate.
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