IMS5600-DS1/VAC
From the interferoMETER 5600-DS series
interferoMETER 5600-DS: sensors and measurement devices by Micro-Epsilon for interferometers.
Download the datasheet (opens in a new tab) This series on the Micro-Epsilon site (opens in a new tab)
Technical specification
Every engineering figure, laid out to scan quickly
| Working distance | 1–2 mm |
|---|---|
| Resolution | 0.00003 µm |
| Operating temperature | 5–70 °C |
| Protection class (DIN EN 60529) | IP40 |
| Technical specification details | 0-1 mm model-level measuring interval |
| Accuracy | 0.01 µm |
| Linearity reference | Official interferoMETER 5600-DS linearity +/-10 nm; 30 pm resolution is stored separately and is not substituted for linearity. |
| Sampling rate reference | IMS5600-DS controller |
| Contact | Non-contact |
Values by configuration
These values differ with the controller or interface the sensor is used with. Each row applies to one configuration only; check the configuration in the system builder or with us.
| Interfaces | Ethernet |
|---|---|
| Interfaces | EtherCAT |
| Outputs and interfaces | Digital I/O |
| Outputs and interfaces | RS422 / RS485 |
| Outputs and interfaces | 4-20mA |
| Outputs and interfaces | Analog 0-10V |
Compatible accessories
Optical fibres
Accessories
Cables
Mounting
Power supplies
Complementary products
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