interferoMETER 5600-DS Interferometers
interferoMETER 5600-DS: sensors and measurement devices by Micro-Epsilon for interferometers.
Download the datasheet (opens in a new tab) This series on the Micro-Epsilon site (opens in a new tab)
Shared technical specifications for the series
Properties every model in the series has. What differs is in the models table below.
Range across models
The span covered by the models of the series together — not the range of each model.
| Working distance | 0.5–21.1 mm |
|---|
Models in the series
One column per model: what differs between the models of the series.
| Parameter | IMS5600-DS0.5/90/VAC | IMS5600-DS1/VAC | IMS5600-DS10/90/VAC | IMS5600-DS19 | IMS5600-DS19/VAC | IMS5600MP-DS19 | IMS5600MP-DS19/VAC |
|---|---|---|---|---|---|---|---|
| Outputs and interfaces | Digital I/O | Digital I/O | RS422 / RS485 | 4-20mA | Digital I/O | 4-20mA | Analog 0-10V |
| Technical specification details | 0-1.5 mm model-level measuring interval | 0-1 mm model-level measuring interval | 0-1.5 mm model-level measuring interval | 0-2.1 mm model-level measuring interval | 0-2.1 mm model-level measuring interval | 0-2.1 mm model-level measuring interval | 0-2.1 mm model-level measuring interval |
| Accuracy | 0.01 µm | 0.01 µm | 0.01 µm | 0.01 µm | 0.01 µm | 0.01 µm | 0.01 µm |
| Operating temperature | 5–70 °C | 5–70 °C | 5–70 °C | 5–70 °C | 5–70 °C | 5–70 °C | 5–70 °C |
| Protection class (DIN EN 60529) | IP40 | IP40 | IP40 | IP40 | IP40 | IP40 | IP40 |
| Interfaces | Ethernet | Ethernet | EtherCAT | Ethernet | EtherCAT | EtherCAT | EtherCAT |
| Sampling rate reference | IMS5600-DS controller | IMS5600-DS controller | IMS5600-DS controller | IMS5600-DS controller | IMS5600-DS controller | IMS5600MP-DS controller | IMS5600MP-DS controller |
| Linearity reference | Official interferoMETER 5600-DS linearity +/-10 nm; 30 pm resolution is stored separately and is not substituted for linearity. | Official interferoMETER 5600-DS linearity +/-10 nm; 30 pm resolution is stored separately and is not substituted for linearity. | Official interferoMETER 5600-DS linearity +/-10 nm; 30 pm resolution is stored separately and is not substituted for linearity. | Official interferoMETER 5600-DS linearity +/-10 nm; 30 pm resolution is stored separately and is not substituted for linearity. | Official interferoMETER 5600-DS linearity +/-10 nm; 30 pm resolution is stored separately and is not substituted for linearity. | Official interferoMETER 5600-DS linearity +/-10 nm; 30 pm resolution is stored separately and is not substituted for linearity. | Official interferoMETER 5600-DS linearity +/-10 nm; 30 pm resolution is stored separately and is not substituted for linearity. |
| Resolution | 0.00003 µm | 0.00003 µm | 0.00003 µm | 0.00003 µm | 0.00003 µm | 0.00003 µm | 0.00003 µm |
| Working distance | 0.5–2 mm | 1–2 mm | 10–11.5 mm | 19–21.1 mm | 19–21.1 mm | 19–21.1 mm | 19–21.1 mm |
| Contact | Non-contact | Non-contact | Non-contact | Non-contact | Non-contact | Non-contact | Non-contact |
| ADC sampling rate | 6000 samples/s | 6000 samples/s | 6000 samples/s | 6000 samples/s | 6000 samples/s | 6000 samples/s | 6000 samples/s |
| Status | Active | Active | Active | Active | Active | Active | Active |
| Datasheet | PDF — IMS5600-DS0.5/90/VAC (opens in a new tab) | PDF — IMS5600-DS1/VAC (opens in a new tab) | PDF — IMS5600-DS10/90/VAC (opens in a new tab) | PDF — IMS5600-DS19 (opens in a new tab) | PDF — IMS5600-DS19/VAC (opens in a new tab) | PDF — IMS5600MP-DS19 (opens in a new tab) | PDF — IMS5600MP-DS19/VAC (opens in a new tab) |
The industries we serve
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Aerospace
- Aircraft door-lock position detection
- Airlines & Aerospace Our balancing machines and moment weighing scales for aerospace drives ensure maximum precision, ease of use, and modular flexibility delivering reliability and performance without compromise contributing to your economic success.
- Automatic balancing machines Automatic balancing machines from Schenck are advanced solutions for precise balancing of rotating components in automated production processes. We offer systems and stations for balancing crankshafts, wheels and tires, turbochargers, electric armatures, drives, axle drive units, torque converters, drive shafts, disc-shaped rotors, as well as fans. Our systems increase productivity, ensure consistent quality, and are tailored to the needs of the automotive, energy, and industrial sectors.
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Medical industry
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Environment
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Electric motor manufacturing
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Food industry
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Automotive industry
- Airlines & Aerospace Our balancing machines and moment weighing scales for aerospace drives ensure maximum precision, ease of use, and modular flexibility delivering reliability and performance without compromise contributing to your economic success.
- Automatic balancing machines Automatic balancing machines from Schenck are advanced solutions for precise balancing of rotating components in automated production processes. We offer systems and stations for balancing crankshafts, wheels and tires, turbochargers, electric armatures, drives, axle drive units, torque converters, drive shafts, disc-shaped rotors, as well as fans. Our systems increase productivity, ensure consistent quality, and are tailored to the needs of the automotive, energy, and industrial sectors.
- Axle Drives With our balancing machines for front and rear axle transmissions, the measured unbalance is corrected by drilling into the drive flanges of the transmissions (welding optional). We support you with our interdisciplinary expertise in the production of front and rear axle transmissions from the initial idea to the design stage through to series production.
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Industrial automation
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Plastics
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Optics
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3D printing
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Battery manufacturing
Frequently asked questions
Answers to the most common questions about our products and services
Yes. It is designed for absolute distance measurement, including step profiles. Its output is not merely displacement relative to an initial position.
The footnote specifies 0.5 kHz, a 64-value moving average, stable temperature and differential glass measurement at mid-range. It is not an unconditional 6 kHz resolution.
No. The MP table distinguishes <±10 nm for the first distance from <±100 nm for each additional distance.
The footnote identifies PROFINET and EtherNet/IP as optional connections through an interface module. Ethernet, EtherCAT and RS422 are listed separately.
Select dedicated head, fiber and vacuum feedthroughs. UHV-compatible optical components do not make the controller vacuum-rated; the tabulated controller is IP40.
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