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IMS5600MP-DS19/VAC

From the interferoMETER 5600-DS series

interferoMETER 5600-DS: sensors and measurement devices by Micro-Epsilon for interferometers.

Download the datasheet (opens in a new tab) This series on the Micro-Epsilon site (opens in a new tab)

Technical specification

Every engineering figure, laid out to scan quickly

Technical specification for IMS5600MP-DS19/VAC
Working distance 19–21.1 mm
Resolution 0.00003 µm
Operating temperature 5–70 °C
Protection class (DIN EN 60529) IP40
Technical specification details 0-2.1 mm model-level measuring interval
Accuracy 0.01 µm
Linearity reference Official interferoMETER 5600-DS linearity +/-10 nm; 30 pm resolution is stored separately and is not substituted for linearity.
Sampling rate reference IMS5600MP-DS controller
Contact Non-contact

Values by configuration

These values differ with the controller or interface the sensor is used with. Each row applies to one configuration only; check the configuration in the system builder or with us.

Interfaces EtherCAT
Interfaces Ethernet
Outputs and interfaces Analog 0-10V
Outputs and interfaces RS422 / RS485
Outputs and interfaces Digital I/O
Outputs and interfaces 4-20mA
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